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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">mateltech</journal-id><journal-title-group><journal-title xml:lang="ru">Известия высших учебных заведений. Материалы электронной техники</journal-title><trans-title-group xml:lang="en"><trans-title>Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1609-3577</issn><issn pub-type="epub">2413-6387</issn><publisher><publisher-name>MISIS</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.17073/1609-3577-2020-1-57-70</article-id><article-id custom-type="elpub" pub-id-type="custom">mateltech-397</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Моделирование процессов и материалов</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>MODELING OF PROCESSES AND MATERIALS</subject></subj-group></article-categories><title-group><article-title>Материаловедческие вопросы термодинамического моделирования тонкопленочных твердотельных электрокалорических охладителей</article-title><trans-title-group xml:lang="en"><trans-title>Materials issues in thermal modeling of thin film electrocaloric solid-state refrigerators</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-9440-2232</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Суханек</surname><given-names>Г.</given-names></name><name name-style="western" xml:lang="en"><surname>Suchaneck</surname><given-names>G.</given-names></name></name-alternatives><bio xml:lang="ru"><p>01062 Дрезден, Германия</p><p>Гуннар Суханек — лаборатория твердотельной электроники</p></bio><bio xml:lang="en"><p>01062 Dresden</p><p>Gunnar Suchaneck: Solid State Electronics Laboratory</p></bio><email xlink:type="simple">Gunnar.Suchaneck@tu-dresden.de</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Фельсберг</surname><given-names>Л.</given-names></name><name name-style="western" xml:lang="en"><surname>Felsberg</surname><given-names>L.</given-names></name></name-alternatives><bio xml:lang="ru"><p>01062 Дрезден, Германия</p><p>Линда Фельсберг — лаборатория твердотельной электроники</p></bio><bio xml:lang="en"><p>01062 Dresden</p><p>Linda Felsberg: Solid State Electronics Laboratory</p></bio><email xlink:type="simple">Felsberg@falsh.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-7062-9598</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Герлах</surname><given-names>Г.</given-names></name><name name-style="western" xml:lang="en"><surname>Gerlach</surname><given-names>G.</given-names></name></name-alternatives><bio xml:lang="ru"><p>01062 Дрезден, Германия</p><p>Геральд Герлах — лаборатория твердотельной электроники</p></bio><bio xml:lang="en"><p>01062 Dresden</p><p>Gerald Gerlach: Solid State Electronics Laboratory</p></bio><email xlink:type="simple">Gerlach@falsh.ru</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Дрезденский технический университет</institution><country>Германия</country></aff><aff xml:lang="en"><institution>Technische Universität Dresden</institution><country>Germany</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2020</year></pub-date><pub-date pub-type="epub"><day>12</day><month>04</month><year>2020</year></pub-date><volume>23</volume><issue>1</issue><fpage>57</fpage><lpage>70</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Суханек Г., Фельсберг Л., Герлах Г., 2020</copyright-statement><copyright-year>2020</copyright-year><copyright-holder xml:lang="ru">Суханек Г., Фельсберг Л., Герлах Г.</copyright-holder><copyright-holder xml:lang="en">Suchaneck G., Felsberg L., Gerlach G.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://met.misis.ru/jour/article/view/397">https://met.misis.ru/jour/article/view/397</self-uri><abstract><p>Электрокалорическое охлаждение является экологически безопасной технологией преобразования энергии. Электрическое поле, необходимое для возбуждения цикла электрокалорического охлаждения, может быть создано значительно проще и с гораздо меньшими затратами по сравнению с магнитными полями, используемыми для магнетокалорического охлаждения. Кроме того, электрическая мощность, необходимая для электрокалорического охлаждения, может обеспечиваться стационарными или мобильными солнечными батареями, а также аккумуляторами электромобиля. Это открывает совершенно новые возможности для экологически безопасного промышленного прогресса в развивающихся странах. На основе аналитически решаемой модели многослойного электрокалорического охладителя обсуждены свойства материалов, влияющие на эксплуатационные характеристики электрокалорических приборов. Особое внимание уделено объемному термическому сопротивлению и термическому сопротивлению интерфейсов. Даны оценки средней охлаждающей мощности стека микроэлектромеханического электрокалорического охладителя.</p></abstract><trans-abstract xml:lang="en"><p>Materials properties affecting EC device operation are discussed based on an analytically tractable model of a layered EC refrigerator. Special attention was paid to thermal and interface thermal resistances. Estimates of the average cooling power of a stacked MEMS-based EC refrigerator were made.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>электрокалорическое охлаждение</kwd><kwd>теплопередача</kwd><kwd>термическое сопротивление</kwd><kwd>жидкие теплоносители</kwd><kwd>охлаждающая способность</kwd></kwd-group><kwd-group xml:lang="en"><kwd>electrocaloric cooling</kwd><kwd>heat transfer</kwd><kwd>thermal resistance</kwd><kwd>heat transfer fluids</kwd><kwd>cooling power</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Эта работа была поддержана Немецким исследовательским фондом (DFG) в рамках правительственной приоритетной программы «Ferroic Cooling» (SPP1599, проект B6). Авторы благодарят R. Liebschner за предоставление рис. 1, б.</funding-statement><funding-statement xml:lang="en">This work was supported by the German Research Foundation (DFG) within the Priority Program «Ferroic Cooling» (SPP1599, project B6). The authors thank R. Liebschner for providing fig. 1, б.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Suchaneck G., Pakhomov O., Gerlach G. Electrocaloric cooling // In: Refrigeration. Orhan Ekren (Ed.). Rijeka: Intech, 2017. P. 19—43. DOI: 10.5772/intechopen.68599</mixed-citation><mixed-citation xml:lang="en">Suchaneck G., Pakhomov O., Gerlach G. Electrocaloric cooling. In: Refrigeration. Orhan Ekren (Ed.). Rijeka: Intech, 2017, pp. 19—43. DOI: 10.5772/intechopen.68599</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">Suchaneck G., Gerlach G. Electrocaloric cooling based on relaxor ferroelectrics // Phase Transit. 2015. V. 88, N 3. P. 333. DOI: 10.1080/01411594.2014.989225</mixed-citation><mixed-citation xml:lang="en">Suchaneck G., Gerlach G. Electrocaloric cooling based on relaxor ferroelectrics. Phase Transit. 2015, vol. 88, no. 3, p. 333. DOI: 10.1080/01411594.2014.989225</mixed-citation></citation-alternatives></ref><ref id="cit3"><label>3</label><citation-alternatives><mixed-citation xml:lang="ru">Valant M. Electrocaloric materials for future solid-state refrigeration technologies // Prog. Mater. Sci. 2012. V. 57, N 6. P. 980. DOI: 10.1016/j.pmatsci.2012.02.001</mixed-citation><mixed-citation xml:lang="en">Valant M. Electrocaloric materials for future solid-state refrigeration technologies. Prog. Mater. Sci., 2012, vol. 57, no. 6, p. 980. DOI: 10.1016/j.pmatsci.2012.02.001</mixed-citation></citation-alternatives></ref><ref id="cit4"><label>4</label><citation-alternatives><mixed-citation xml:lang="ru">Lu S. G., Rožič B., Zhang Q. M., Kutnjak Z., Li Xinyu, Furman E., Gorny L. J., Lin M., Malič B., Kosec M., Blinc R., Pirc R. Organic and inorganic relaxor ferroelectrics with giant electrocaloric effect // Appl. Phys. Lett. 2010. V. 97, N 16. P. 162904. DOI: 10.1063/1.3501975</mixed-citation><mixed-citation xml:lang="en">Lu S. G., Rožič B., Zhang Q. M., Kutnjak Z., Li Xinyu, Furman E., Gorny L. J., Lin M., Malič B., Kosec M., Blinc R., Pirc R. Organic and inorganic relaxor ferroelectrics with giant electrocaloric effect. Appl. Phys. Lett., 2010, vol. 97, no. 16, p. 162904. DOI: 10.1063/1.3501975</mixed-citation></citation-alternatives></ref><ref id="cit5"><label>5</label><citation-alternatives><mixed-citation xml:lang="ru">Qian Xiao-Shi, Ye Hui-Jian, Zhang Ying-Tang, Gu Haiming, Li Xinyu, Randall C. A., Zhang Q. M. Giant electrocaloric response over a broad temperature range in modified BaTiO3 ceramics // Adv. Funct. Mater. 2014. V. 24, N 9. P. 1300. DOI: 10.1002/adfm.201302386</mixed-citation><mixed-citation xml:lang="en">Qian Xiao-Shi, Ye Hui-Jian, Zhang Ying-Tang, Gu Haiming, Li Xinyu, Randall C. A., Zhang Q. M. Giant electrocaloric response over a broad temperature range in modified BaTiO3 ceramics. Adv. Funct. Mater., 2014, vol. 24, no. 9, p. 1300. DOI: 10.1002/adfm.201302386</mixed-citation></citation-alternatives></ref><ref id="cit6"><label>6</label><citation-alternatives><mixed-citation xml:lang="ru">Smith N. A. S., Rokosz M. K., Correia T. M. Experimentally validated finite element model of electrocaloric multilayer ceramic structures // J. Appl. Phys. 2014. V. 116, N 4. P. 044511. DOI: 10.1063/1.4891298</mixed-citation><mixed-citation xml:lang="en">Smith N. A. S., Rokosz M. K., Correia T. M. Experimentally validated finite element model of electrocaloric multilayer ceramic structures. J. Appl. Phys., 2014, vol. 116, no. 4, p. 044511. DOI: 10.1063/1.4891298</mixed-citation></citation-alternatives></ref><ref id="cit7"><label>7</label><citation-alternatives><mixed-citation xml:lang="ru">Kar-Narayan S., Mathur N. D. Predicted cooling powers for multilayer capacitors based on various electrocaloric and electrode materials // Appl. Phys. Lett. 2009. V. 95, N 24. P. 242903. DOI: 10.1063/1.3275013</mixed-citation><mixed-citation xml:lang="en">Kar-Narayan S., Mathur N. D. Predicted cooling powers for multilayer capacitors based on various electrocaloric and electrode materials. Appl. Phys. Lett., 2009, vol. 95, no. 24, p. 242903. DOI: 10.1063/1.3275013</mixed-citation></citation-alternatives></ref><ref id="cit8"><label>8</label><citation-alternatives><mixed-citation xml:lang="ru">Crossley S., McGinnigle J. R., Kar-Narayan S., Mathur N. D. Finite-element optimisation of electrocaloric multilayer capacitors // Appl. Phys. Lett. 2014. V. 104, N 8. P. 082909. DOI: 10.1063/1.4866256</mixed-citation><mixed-citation xml:lang="en">Crossley S., McGinnigle J. R., Kar-Narayan S., Mathur N. D. Finite-element optimisation of electrocaloric multilayer capacitors. Appl. Phys. Lett., 2014, vol. 104, no. 8, p. 082909. DOI: 10.1063/1.4866256</mixed-citation></citation-alternatives></ref><ref id="cit9"><label>9</label><citation-alternatives><mixed-citation xml:lang="ru">Ju Y. S. Solid-state refrigeration based on the electrocaloric effect for electronics cooling // J. Electron. Packag. 2010. V. 132, N 4. P. 041004. DOI: 10.1115/1.4002896</mixed-citation><mixed-citation xml:lang="en">Ju Y. S. Solid-state refrigeration based on the electrocaloric effect for electronics cooling. J. Electron. Packag., 2010, vol. 132, no. 4, p. 041004. DOI: 10.1115/1.4002896</mixed-citation></citation-alternatives></ref><ref id="cit10"><label>10</label><citation-alternatives><mixed-citation xml:lang="ru">Aprea C., Greco A., Maiorino A., Masselli C. A comparison between different materials in an active electrocaloric regenerative cycle with a 2D numerical model // Int. J. Refrig. 2016. V. 69. P. 369. DOI: 10.1016/j.ijrefrig.2016.06.016</mixed-citation><mixed-citation xml:lang="en">Aprea C., Greco A., Maiorino A., Masselli C. A comparison between different materials in an active electrocaloric regenerative cycle with a 2D numerical model. Int. J. Refrig., 2016, vol. 69, p. 369. DOI: 10.1016/j.ijrefrig.2016.06.016</mixed-citation></citation-alternatives></ref><ref id="cit11"><label>11</label><citation-alternatives><mixed-citation xml:lang="ru">Guo D., Gao J., Yu Y.-J., Santhanam S., Slippey A., Fedder G. K., McGaughey A. J. H., Yao S. C. Design and modeling of a fluid-based micro-scale electrocaloric refrigeration system // Int. J. Heat Mass Transf. 2014. V. 72. P. 559. DOI: 10.1016/j.ijheatmasstransfer.2014.01.043</mixed-citation><mixed-citation xml:lang="en">Guo D., Gao J., Yu Y.-J., Santhanam S., Slippey A., Fedder G. K., McGaughey A. J. H., Yao S. C. Design and modeling of a fluid-based micro-scale electrocaloric refrigeration system. Int. J. Heat Mass Transf., 2014, vol. 72, p. 559. DOI: 10.1016/j.ijheatmasstransfer.2014.01.043</mixed-citation></citation-alternatives></ref><ref id="cit12"><label>12</label><citation-alternatives><mixed-citation xml:lang="ru">Feng D., Yao S.-C., Zhang T., Zhang Q. Modeling of a smart heat pump made of laminated thermoelectric and electrocaloric materials // J. Electron. Packag. 2016. V. 138, N 4. P. 041004. DOI: 10.1115/1.4034751</mixed-citation><mixed-citation xml:lang="en">Feng D., Yao S.-C., Zhang T., Zhang Q. Modeling of a smart heat pump made of laminated thermoelectric and electrocaloric materials. J. Electron. Packag., 2016, vol. 138, no. 4, p. 041004. DOI: 10.1115/1.4034751</mixed-citation></citation-alternatives></ref><ref id="cit13"><label>13</label><citation-alternatives><mixed-citation xml:lang="ru">Hirasawa S., Kawanami T. Shirai K. Electrocaloric refrigeration using multi-layers of electrocaloric material films and thermal switches // Heat Transfer Eng. 2018. V. 39, N 12. P. 1091—1099. DOI: 10.1080/01457632.2017.1358490</mixed-citation><mixed-citation xml:lang="en">Hirasawa S., Kawanami T. Shirai K. Electrocaloric refrigeration using multi-layers of electrocaloric material films and thermal switches. Heat Transfer Eng., 2018, vol. 39, no. 12, pp. 1091—1099. DOI: 10.1080/01457632.2017.1358490</mixed-citation></citation-alternatives></ref><ref id="cit14"><label>14</label><citation-alternatives><mixed-citation xml:lang="ru">Bergmann T. L., Lavine A. S., Incropera F. P., Dewitt D. P. Fundamentals of Heat and Mass Transfer. Hoboken (NJ): John Wiley &amp; Sons, 2011. 1050 p.</mixed-citation><mixed-citation xml:lang="en">Bergmann T. L., Lavine A. S., Incropera F. P., Dewitt D. P. Fundamentals of Heat and Mass Transfer. Hoboken (NJ): John Wiley &amp; Sons, 2011, 1050 p.</mixed-citation></citation-alternatives></ref><ref id="cit15"><label>15</label><citation-alternatives><mixed-citation xml:lang="ru">Ma R., Zhang Z., Tong K., Huber D., Kornbluh R., Ju Y. S., Pei Q. Highly efficient electrocaloric cooling with electrostatic actuation // Science. 2017. V. 357, N 6356. P. 1130. DOI: 10.1126/science.aan5980</mixed-citation><mixed-citation xml:lang="en">Ma R., Zhang Z., Tong K., Huber D., Kornbluh R., Ju Y. S., Pei Q. Highly efficient electrocaloric cooling with electrostatic actuation. Science, 2017, vol. 357, no. 6356, p. 1130. DOI: 10.1126/science.aan5980</mixed-citation></citation-alternatives></ref><ref id="cit16"><label>16</label><citation-alternatives><mixed-citation xml:lang="ru">Carslaw H. S., Jaeger J. C. Conduction of Heat in Solids. Oxford: Oxford Science Publications, 1959. 510 p.</mixed-citation><mixed-citation xml:lang="en">Carslaw H. S., Jaeger J. C. Conduction of Heat in Solids. Oxford: Oxford Science Publications, 1959, 510 p.</mixed-citation></citation-alternatives></ref><ref id="cit17"><label>17</label><citation-alternatives><mixed-citation xml:lang="ru">Putley E. H. The pyroelectric detector. In: Semiconducton and Semimetals. Vol. 5. / Eds. R. K. Willardson and A. C. Beer. New York: Academic Press, 1970. P. 259—285.</mixed-citation><mixed-citation xml:lang="en">Putley E. H. The pyroelectric detector. In: Semiconducton and Semimetals. Vol. 5. R. K. Willardson and A. C. Beer (Eds.). New York: Academic Press, 1970, pp. 259—285.</mixed-citation></citation-alternatives></ref><ref id="cit18"><label>18</label><citation-alternatives><mixed-citation xml:lang="ru">Kubo R. Thermodynamics. An Advanced Course with Problems and Solutions. Amsterdam; New York: North-Holland Pub. Co, 1968. P. 186.</mixed-citation><mixed-citation xml:lang="en">Kubo R. Thermodynamics. An Advanced Course with Problems and Solutions. Amsterdam; New York: North-Holland Pub. Co, 1968, Ch. 3(§1), p. 186.</mixed-citation></citation-alternatives></ref><ref id="cit19"><label>19</label><citation-alternatives><mixed-citation xml:lang="ru">Adby P. R. Applied Circuit Theory: Matrix and Computer Methods. London: Ellis Horwood Ltd., 1980.</mixed-citation><mixed-citation xml:lang="en">Adby P. R. Applied Circuit Theory: Matrix and Computer Methods. London: Ellis Horwood Ltd., 1980.</mixed-citation></citation-alternatives></ref><ref id="cit20"><label>20</label><citation-alternatives><mixed-citation xml:lang="ru">Blevin W. R., Geist J. Influence of black coatings on pyroelectric detectors // Appl. Optics. 1974. V. 13, N 5. P. 1171. DOI: 10.1364/AO.13.001171</mixed-citation><mixed-citation xml:lang="en">Blevin W. R., Geist J. Influence of black coatings on pyroelectric detectors. Appl. Optics., 1974, vol. 13, no. 5, p. 1171. DOI: 10.1364/AO.13.001171</mixed-citation></citation-alternatives></ref><ref id="cit21"><label>21</label><citation-alternatives><mixed-citation xml:lang="ru">Zajosz J. Pyroelectric response to step radiation signals in thin ferroelectric films on a substrate // Thin Solid Films. 1979. V. 62, N 2. P. 229. DOI: 10.1016/0040-6090(79)90310-9</mixed-citation><mixed-citation xml:lang="en">Zajosz J. Pyroelectric response to step radiation signals in thin ferroelectric films on a substrate. Thin Solid Films, 1979, vol. 62, no. 2, p. 229. DOI: 10.1016/0040-6090(79)90310-9</mixed-citation></citation-alternatives></ref><ref id="cit22"><label>22</label><citation-alternatives><mixed-citation xml:lang="ru">Samoilov V. B., Yoon Y. S. Frequency response of multilayer pyroelectric sensors // IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 1998. V. 45, N 5. P. 1246. DOI: 10.1109/58.726450</mixed-citation><mixed-citation xml:lang="en">Samoilov V. B., Yoon Y. S. Frequency response of multilayer pyroelectric sensors. IEEE Trans. Ultrason. Ferroelectr. Freq. Control., 1998, vol. 45, no. 5, p. 1246. DOI: 10.1109/58.726450</mixed-citation></citation-alternatives></ref><ref id="cit23"><label>23</label><citation-alternatives><mixed-citation xml:lang="ru">Liu S. T., Long D. Pyroelectric detectors and materials // Proc. IEEE. 1978. V. 66, N 1. P. 14. DOI: 10.1109/PROC.1978.10835</mixed-citation><mixed-citation xml:lang="en">Liu S. T., Long D. Pyroelectric detectors and materials. Proc. IEEE, 1978, vol. 66, no.1, p. 14. DOI: 10.1109/PROC.1978.10835</mixed-citation></citation-alternatives></ref><ref id="cit24"><label>24</label><citation-alternatives><mixed-citation xml:lang="ru">Ye H.-J., Qian X.-S., Jeong D.-Y., Zhang S., Zhou Y., Shao W.-Z., Zhen L., Zhang Q. M. Giant electrocaloric effect in BaZr0.2Ti0.8O3 thick film // Appl. Phys. Lett. 2014. V. 105, N 15. P. 152908. DOI: 10.1063/1.4898599</mixed-citation><mixed-citation xml:lang="en">Ye H.-J., Qian X.-S., Jeong D.-Y., Zhang S., Zhou Y., Shao W.-Z., Zhen L., Zhang Q. M. Giant electrocaloric effect in BaZr0.2Ti0.8O3 thick film. Appl. Phys. Lett., 2014, vol. 105, no. 15, p. 152908. DOI: 10.1063/1.4898599</mixed-citation></citation-alternatives></ref><ref id="cit25"><label>25</label><citation-alternatives><mixed-citation xml:lang="ru">Kell R. C., Hellicar N. J. Structural transitions in barium titanate-zirconate transducer materials // Acta Acustica united with Acustica. 1956. V. 6, N 2. P. 235—245.</mixed-citation><mixed-citation xml:lang="en">Kell R. C., Hellicar N. J. Structural transitions in barium titanate-zirconate transducer materials. Acta Acustica united with Acustica, 1956, vol. 6, no. 2, pp. 235—245.</mixed-citation></citation-alternatives></ref><ref id="cit26"><label>26</label><citation-alternatives><mixed-citation xml:lang="ru">Hennings D., Schnell A., Simon G. Diffuse ferroelectric phase transitions in Ba(Ti1-yZry)O3 ceramics // J. Am. Ceram. Soc. 1982. V. 65, N 11. P. 539. DOI: 10.1111/j.1151-2916.1982.tb10778.x</mixed-citation><mixed-citation xml:lang="en">Hennings D., Schnell A., Simon G. Diffuse ferroelectric phase transitions in Ba(Ti1-yZry)O3 ceramics. J. Am. Ceram. Soc., 1982, vol. 65, no. 11, p. 539. DOI: 10.1111/j.1151-2916.1982.tb10778.x</mixed-citation></citation-alternatives></ref><ref id="cit27"><label>27</label><citation-alternatives><mixed-citation xml:lang="ru">Yu Z., Ang C., Guo R., Bhalla A. S. Ferroelectric-relaxor behavior of Ba(Ti0.7Zr0.3)O3 ceramics // J. Appl. Phys. 2002. V. 92, N 5. P. 2655. DOI: 10.1063/1.1495069</mixed-citation><mixed-citation xml:lang="en">Yu Z., Ang C., Guo R., Bhalla A. S. Ferroelectric-relaxor behavior of Ba(Ti0.7Zr0.3)O3 ceramics. J. Appl. Phys., 2002, vol. 92, no. 5, p. 2655. DOI: 10.1063/1.1495069</mixed-citation></citation-alternatives></ref><ref id="cit28"><label>28</label><citation-alternatives><mixed-citation xml:lang="ru">KleemannW., Miga S., Dec J., Zhai J. Crossover from ferroelectric to relaxor and cluster glass in BaTi1-xZrxO3 (x = 0.25–0.35) studied by non-linear permittivity // Appl. Phys. Lett. 2013. V. 102, N 23. P. 232907. DOI: 10.1063/1.4811089</mixed-citation><mixed-citation xml:lang="en">KleemannW., Miga S., Dec J., Zhai J. Crossover from ferroelectric to relaxor and cluster glass in BaTi1-xZrxO3 (x = 0.25–0.35) studied by non-linear permittivity. Appl. Phys. Lett., 2013, vol. 102, no. 23, p. 232907. DOI: 10.1063/1.4811089</mixed-citation></citation-alternatives></ref><ref id="cit29"><label>29</label><citation-alternatives><mixed-citation xml:lang="ru">Lei C., Bokov A. A., Ye Z.-G. Ferroelectric to relaxor crossover and dielectric phase diagram in the BaTiO3—BaSnO3 system // J. Appl. Phys. 2007. V. 101, N 8. P. 084105. DOI: 10.1063/1.2715522</mixed-citation><mixed-citation xml:lang="en">Lei C., Bokov A. A., Ye Z.-G. Ferroelectric to relaxor crossover and dielectric phase diagram in the BaTiO3—BaSnO3 system. J. Appl. Phys., 2007, vol. 101, no. 8, p. 084105. DOI: 10.1063/1.2715522</mixed-citation></citation-alternatives></ref><ref id="cit30"><label>30</label><citation-alternatives><mixed-citation xml:lang="ru">Roberts S. Dielectric properties of lead zirconate and barium-lead zirconate // J. Am. Ceram. Soc. 1950. V. 33, N 2. P. 63—66. DOI: 10.1111/j.1151-2916.1950.tb14168.x</mixed-citation><mixed-citation xml:lang="en">Roberts S. Dielectric properties of lead zirconate and barium-lead zirconate. J. Am. Ceram. Soc., 1950, vol. 33, no. 2, pp. 63—66. DOI: 10.1111/j.1151-2916.1950.tb14168.x</mixed-citation></citation-alternatives></ref><ref id="cit31"><label>31</label><citation-alternatives><mixed-citation xml:lang="ru">Guzmán-Verri G. G., Littlewood P. B. Why is the electrocaloric effect so small in ferroelectrics? // APL Mater. 2016. V. 4, N 6. P. 064106. DOI: 10.1063/1.4950788</mixed-citation><mixed-citation xml:lang="en">Guzmán-Verri G. G., Littlewood P. B. Why is the electrocaloric effect so small in ferroelectrics? APL Mater., 2016, vol. 4, no. 6, p. 064106. DOI: 10.1063/1.4950788</mixed-citation></citation-alternatives></ref><ref id="cit32"><label>32</label><citation-alternatives><mixed-citation xml:lang="ru">Tang X. G., Chew K.-H., Chan H. L. W., Diffuse phase transition and dielectric tunability of Ba(ZryTi1-y)O3 relaxor ferroelectric ceramics // Acta Materialia. 2004. V. 52, N 17. P. 5177. DOI: 10.1016/j.actamat.2004.07.028</mixed-citation><mixed-citation xml:lang="en">Tang X. G., Chew K.-H., Chan H. L. W., Diffuse phase transition and dielectric tunability of Ba(ZryTi1-y)O3 relaxor ferroelectric ceramics. Acta Materialia, 2004, vol. 52, no. 17, p. 5177. DOI: 10.1016/j.actamat.2004.07.028</mixed-citation></citation-alternatives></ref><ref id="cit33"><label>33</label><citation-alternatives><mixed-citation xml:lang="ru">Suchaneck G., Gerlach G. The impact of the P-E hysteresis on the performance of electrocaloric cooling // Ferroelectrics. 2017. V. 516, N 1. P. 1. DOI: 10.1080/00150193.2017.1362231</mixed-citation><mixed-citation xml:lang="en">Suchaneck G., Gerlach G. The impact of the P-E hysteresis on the performance of electrocaloric cooling. Ferroelectrics, 2017, vol. 516, no. 1, p. 1. DOI: 10.1080/00150193.2017.1362231</mixed-citation></citation-alternatives></ref><ref id="cit34"><label>34</label><citation-alternatives><mixed-citation xml:lang="ru">Lyeo Ho-Ki, Cahill D. G. Thermal conductance of interfaces between highly dissimilar materials // Phys. Rev. B. 2006. V. 73, N 14. P. 144301. DOI: 10.1103/PhysRevB.73.144301</mixed-citation><mixed-citation xml:lang="en">Lyeo Ho-Ki, Cahill D. G. Thermal conductance of interfaces between highly dissimilar materials. Phys. Rev. B, 2006, vol. 73, no. 14, p. 144301. DOI: 10.1103/PhysRevB.73.144301</mixed-citation></citation-alternatives></ref><ref id="cit35"><label>35</label><citation-alternatives><mixed-citation xml:lang="ru">George P. K., Thompson E. D. The Debye temperature of nickel from 0 to 300 K // J. Phys. Chem. Solids. 1967. V. 28, N 12. P. 2539. DOI: 10.1016/0022-3697(67)90040-6</mixed-citation><mixed-citation xml:lang="en">George P. K., Thompson E. D. The Debye temperature of nickel from 0 to 300 K. J. Phys. Chem. Solids, 1967, vol. 28, no. 12, p. 2539. DOI: 10.1016/0022-3697(67)90040-6</mixed-citation></citation-alternatives></ref><ref id="cit36"><label>36</label><citation-alternatives><mixed-citation xml:lang="ru">Lide D. R. (Ed.). CRC Handbook of Chemistry and Physics. Boca Raton (FL, USA): CRC Press. 2005. 2660 p.</mixed-citation><mixed-citation xml:lang="en">Lide D. R. (Ed.). CRC Handbook of Chemistry and Physics. Boca Raton (FL, USA): CRC Press. 2005, 2660 p.</mixed-citation></citation-alternatives></ref><ref id="cit37"><label>37</label><citation-alternatives><mixed-citation xml:lang="ru">Yuan S. P., Jiang P. X. Thermal conductivity of small nickel particles // Int. J. Thermophys., 2006. V. 27, N 2. P. 581. DOI: 10.1007/s10765-005-0003-4</mixed-citation><mixed-citation xml:lang="en">Yuan S. P., Jiang P. X. Thermal conductivity of small nickel particles. Int. J. Thermophys., 2006, vol. 27, no. 2, p. 581. DOI: 10.1007/s10765-005-0003-4</mixed-citation></citation-alternatives></ref><ref id="cit38"><label>38</label><citation-alternatives><mixed-citation xml:lang="ru">Stoner E. C. VI. The specific heat of nickel // The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science. Series 7. 1936. V. 22, N 145. P. 81—106. DOI: 10.1080/14786443608561668</mixed-citation><mixed-citation xml:lang="en">Stoner E. C. VI. The specific heat of nickel. The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science. Series 7, 1936, vol. 22, no. 145, pp. 81—106. DOI: 10.1080/14786443608561668</mixed-citation></citation-alternatives></ref><ref id="cit39"><label>39</label><citation-alternatives><mixed-citation xml:lang="ru">Fujimoto J. G., Liu J. M., Ippen E. P. Femtosecond laser interaction with metallic tungsten and nonequilibrium electron and lattice temperatures // Phys. Rev. Lett. 1984. V. 53, N 19. P. 1837—1840. DOI: 10.1103/PhysRevLett.53.1837</mixed-citation><mixed-citation xml:lang="en">Fujimoto J. G., Liu J. M., Ippen E. P. Femtosecond laser interaction with metallic tungsten and nonequilibrium electron and lattice temperatures. Phys. Rev. Lett., 1984, vol. 53, no. 19, pp. 1837—1840. DOI: 10.1103/PhysRevLett.53.1837</mixed-citation></citation-alternatives></ref><ref id="cit40"><label>40</label><citation-alternatives><mixed-citation xml:lang="ru">Schoenlein R. W., Lin W. Z., Fujimoto J. G., Eesley G. L. Femtosecond studies of nonequilibrium electronic processes in metals // Phys. Rev. Lett. 1987. V. 58, N 16. P. 1680. DOI: 10.1103/PhysRevLett.58.1680</mixed-citation><mixed-citation xml:lang="en">Schoenlein R. W., Lin W. Z., Fujimoto J. G., Eesley G. L. Femtosecond studies of nonequilibrium electronic processes in metals. Phys. Rev. Lett., 1987, vol. 58, no. 16, p. 1680. DOI: 10.1103/PhysRevLett.58.1680</mixed-citation></citation-alternatives></ref><ref id="cit41"><label>41</label><citation-alternatives><mixed-citation xml:lang="ru">Ishidate T., Sasaki S. Elastic anomaly and phase transition of BaTiO3 // Phys. Rev. Lett. 1989. V. 62, N 1. P. 67—70. DOI: 10.1103/PhysRevLett.62.67</mixed-citation><mixed-citation xml:lang="en">Ishidate T., Sasaki S. Elastic anomaly and phase transition of BaTiO3. Phys. Rev. Lett., 1989, vol. 62, no. 1, pp. 67—70. DOI: 10.1103/PhysRevLett.62.67</mixed-citation></citation-alternatives></ref><ref id="cit42"><label>42</label><citation-alternatives><mixed-citation xml:lang="ru">He Y. Heat capacity, thermal conductivity, and thermal expansion of barium titanate-based ceramics // Thermochimica Acta. 2004. V. 419, N 1–2. P. 135—141. DOI: 10.1016/j.tca.2004.02.008</mixed-citation><mixed-citation xml:lang="en">He Y. Heat capacity, thermal conductivity, and thermal expansion of barium titanate-based ceramics. Thermochimica Acta, 2004, vol. 419, no. 1–2, pp. 135—141. DOI: 10.1016/j.tca.2004.02.008</mixed-citation></citation-alternatives></ref><ref id="cit43"><label>43</label><citation-alternatives><mixed-citation xml:lang="ru">Chase D. R., Lee-Yin C., York R. A. Modeling the capacitive nonlinearity in thin-film BST varactors // IEEE Trans. Microwave Theory Tech. 2005. V. 53, N 10. P. 3215. DOI: 10.1109/TMTT.2005.855141</mixed-citation><mixed-citation xml:lang="en">Chase D. R., Lee-Yin C., York R. A. Modeling the capacitive nonlinearity in thin-film BST varactors. IEEE Trans. Microwave Theory Tech., 2005, vol. 53, no. 10, p. 3215. DOI: 10.1109/TMTT.2005.855141</mixed-citation></citation-alternatives></ref><ref id="cit44"><label>44</label><citation-alternatives><mixed-citation xml:lang="ru">Park W. Y., Hwang C. S. Film-thickness-dependent Curie-Weiss behavior of (Ba,Sr)TiO3 thin-film capacitors having Pt electrodes // Appl. Phys. Lett. 2004. V. 85, N 22. P. 5313. DOI: 10.1063/1.1828583</mixed-citation><mixed-citation xml:lang="en">Park W. Y., Hwang C. S. Film-thickness-dependent Curie-Weiss behavior of (Ba,Sr)TiO3 thin-film capacitors having Pt electrodes. Appl. Phys. Lett., 2004, vol. 85, no. 22, p. 5313. DOI: 10.1063/1.1828583</mixed-citation></citation-alternatives></ref><ref id="cit45"><label>45</label><citation-alternatives><mixed-citation xml:lang="ru">Lee B. T., Hwang C. S. Influences of interfacial intrinsic low-dielectric layers on the dielectric properties of sputtered (Ba,Sr)TiO3 thin films // Appl. Phys. Lett. 2000. V. 77, N 1. P. 124—126. DOI: 10.1063/1.126897</mixed-citation><mixed-citation xml:lang="en">Lee B. T., Hwang C. S. Influences of interfacial intrinsic low-dielectric layers on the dielectric properties of sputtered (Ba,Sr)TiO3 thin films. Appl. Phys. Lett., 2000, vol. 77, no. 1, pp. 124—126. DOI: 10.1063/1.126897</mixed-citation></citation-alternatives></ref><ref id="cit46"><label>46</label><citation-alternatives><mixed-citation xml:lang="ru">Wang J., Zhang T., Zhang B., Jiang J., Pan R., Ma Z. Interfacial characteristic of (Ba,Sr)TiO3 thin films deposited on different bottom electrodes // J. Mater. Sci.: Mater. Electron. 2009. V. 20, N 12. P. 1208. DOI: 10.1007/s10854-009-9853-z</mixed-citation><mixed-citation xml:lang="en">Wang J., Zhang T., Zhang B., Jiang J., Pan R., Ma Z. Interfacial characteristic of (Ba,Sr)TiO3 thin films deposited on different bottom electrodes. J. Mater. Sci.: Mater. Electron., 2009, vol. 20, no. 12, p. 1208. DOI: 10.1007/s10854-009-9853-z</mixed-citation></citation-alternatives></ref><ref id="cit47"><label>47</label><citation-alternatives><mixed-citation xml:lang="ru">Majumar A., Reddy P. Role of electron–phonon coupling in thermal conductance of metal-nonmetal interfaces // Appl. Phys. Lett. 2004. V. 84, N 23. P. 4768. DOI: 10.1063/1.1758301</mixed-citation><mixed-citation xml:lang="en">Majumar A., Reddy P. Role of electron–phonon coupling in thermal conductance of metal-nonmetal interfaces. Appl. Phys. Lett., 2004, vol. 84, no. 23, p. 4768. DOI: 10.1063/1.1758301</mixed-citation></citation-alternatives></ref><ref id="cit48"><label>48</label><citation-alternatives><mixed-citation xml:lang="ru">Mantelli M. B. H., Yovanovich M. M. Thermal Contact Resistance, ch. 16 // In: Spacecraft Thermal Control Handbook. Vol. I: Fundamental Technologies. El Segundo (CA): The Aerospace Press, 2002. 836 p.</mixed-citation><mixed-citation xml:lang="en">Mantelli M. B. H., Yovanovich M. M. Thermal Contact Resistance, ch. 16. In: Spacecraft Thermal Control Handbook. Vol. I: Fundamental Technologies. El Segundo (CA): The Aerospace Press, 2002, 836 p.</mixed-citation></citation-alternatives></ref><ref id="cit49"><label>49</label><citation-alternatives><mixed-citation xml:lang="ru">Иоссель Ю. Я., Качанов Э. С., Струнский М. Г. Расчет электрической емкости. Ленинград: Энергоиздат, 1981. 288 с.</mixed-citation><mixed-citation xml:lang="en">Iossel' Yu. Ya., Kochanov E. S., Strunsky M. G. Rasshet elektrisheskoi emkosti [Calculation of Electrical Capacity]. Leningrad: Energoisdat, 1981, 288 p. (In Russ.)</mixed-citation></citation-alternatives></ref><ref id="cit50"><label>50</label><citation-alternatives><mixed-citation xml:lang="ru">Xu J., Fisher T. S. Enhancement of thermal interface materials with carbon nanotube arrays // Int. J. Heat Mass Trans. 2006. P. 49, N 9–10. P. 1658. DOI: 10.1016/j.ijheatmasstransfer.2005.09.039</mixed-citation><mixed-citation xml:lang="en">Xu J., Fisher T. S. Enhancement of thermal interface materials with carbon nanotube arrays. Int. J. Heat Mass Trans., 2006, pp. 49, no. 9–10, p. 1658. DOI: 10.1016/j.ijheatmasstransfer.2005.09.039</mixed-citation></citation-alternatives></ref><ref id="cit51"><label>51</label><citation-alternatives><mixed-citation xml:lang="ru">Song W.-B., Sutton M. S., Talghader J. J. Thermal contact conductance of actuated interfaces // Appl. Phys. Lett. 2002. V. 81, N 7. P. 1216. DOI: 10.1063/1.1499518</mixed-citation><mixed-citation xml:lang="en">Song W.-B., Sutton M. S., Talghader J. J. Thermal contact conductance of actuated interfaces. Appl. Phys. Lett., 2002, vol. 81, no. 7, p. 1216. DOI: 10.1063/1.1499518</mixed-citation></citation-alternatives></ref><ref id="cit52"><label>52</label><citation-alternatives><mixed-citation xml:lang="ru">Chen J., Zhang W., Feng Z., Cai W. Determination of thermal contact conductance between thin metal sheets of battery tabs // Int. J. Heat Mass Trans. 2014. V. 69. P. 473. DOI: 10.1016/j.ijheatmasstransfer.2013.10.042</mixed-citation><mixed-citation xml:lang="en">Chen J., Zhang W., Feng Z., Cai W. Determination of thermal contact conductance between thin metal sheets of battery tabs. Int. J. Heat Mass Trans., 2014, vol. 69, p. 473. DOI: 10.1016/j.ijheatmasstransfer.2013.10.042</mixed-citation></citation-alternatives></ref><ref id="cit53"><label>53</label><citation-alternatives><mixed-citation xml:lang="ru">Cho J., Richards C., Bahr D., Jiao J., Richards R. Evaluation of contacts for a MEMS thermal switch // J. Micromech. Microeng. 2008. V. 18, N 10. P. 105012. DOI: 10.1088/0960-1317/18/10/105012</mixed-citation><mixed-citation xml:lang="en">Cho J., Richards C., Bahr D., Jiao J., Richards R. Evaluation of contacts for a MEMS thermal switch. J. Micromech. Microeng., 2008, vol. 18, no. 10, p. 105012. DOI: 10.1088/0960-1317/18/10/105012</mixed-citation></citation-alternatives></ref><ref id="cit54"><label>54</label><citation-alternatives><mixed-citation xml:lang="ru">Jia Y., Ju Y. S. Solid-liquid hybrid thermal interfaces for low-contact pressure thermal switching // J. Heat Transfer. 2014. V. 136, N 7. P. 074503(4p). DOI: 10.1115/1.4027205</mixed-citation><mixed-citation xml:lang="en">Jia Y., Ju Y. S. Solid-liquid hybrid thermal interfaces for low-contact pressure thermal switching. J. Heat Transfer., 2014, vol. 136, no. 7, p. 074503(4p). DOI: 10.1115/1.4027205</mixed-citation></citation-alternatives></ref><ref id="cit55"><label>55</label><citation-alternatives><mixed-citation xml:lang="ru">Cha G., Ju Y. S. Reversible thermal interfaces based on microscale dielectric liquid layers // Appl. Phys. Lett., 2009. V. 94, N 21. P. 211904. DOI: 10.1063/1.3142866</mixed-citation><mixed-citation xml:lang="en">Cha G., Ju Y. S. Reversible thermal interfaces based on microscale dielectric liquid layers. Appl. Phys. Lett., 2009, vol. 94, no. 21, p. 211904. DOI: 10.1063/1.3142866</mixed-citation></citation-alternatives></ref><ref id="cit56"><label>56</label><citation-alternatives><mixed-citation xml:lang="ru">Xu Y., Luo X., Chung D. D. L. Sodium silicate based thermal interface material for high thermal contact conductance // J. Electron. Packag. 1999. V. 122, N 2. P. 128. DOI: 10.1115/1.483144</mixed-citation><mixed-citation xml:lang="en">Xu Y., Luo X., Chung D. D. L. Sodium silicate based thermal interface material for high thermal contact conductance. J. Electron. Packag., 1999, vol. 122, no. 2, p. 128. DOI: 10.1115/1.483144</mixed-citation></citation-alternatives></ref><ref id="cit57"><label>57</label><citation-alternatives><mixed-citation xml:lang="ru">Kumar K., Ayyagari N., Fisher T. S. Effects of graphene nanopetal outgrowths on internal thermal interface resistance in composites // ACS Appl. Mater. Interfaces. 2016. V. 8, N 10. P. 6678. DOI: 10.1021/acsami.5b11796</mixed-citation><mixed-citation xml:lang="en">Kumar K., Ayyagari N., Fisher T. S. Effects of graphene nanopetal outgrowths on internal thermal interface resistance in composites. ACS Appl. Mater. Interfaces, 2016, vol. 8, no. 10, p. 6678. DOI: 10.1021/acsami.5b11796</mixed-citation></citation-alternatives></ref><ref id="cit58"><label>58</label><citation-alternatives><mixed-citation xml:lang="ru">Kimling J., Philippi-Kobs A., Jacobsohn J., Oepen H. P., Cahill D. G. Thermal conductance of interfaces with amorphous SiO2 measured by time-resolved magneto-optic Kerr-effect thermometry // Phys. Rev. B. 2017. V. 95, N 18. P. 184305. DOI: 10.1103/PhysRevB.95.184305</mixed-citation><mixed-citation xml:lang="en">Kimling J., Philippi-Kobs A., Jacobsohn J., Oepen H. P., Cahill D. G. Thermal conductance of interfaces with amorphous SiO2 measured by time-resolved magneto-optic Kerr-effect thermometry. Phys. Rev. B, 2017, vol. 95, no. 18, p. 184305. DOI: 10.1103/PhysRevB.95.184305</mixed-citation></citation-alternatives></ref><ref id="cit59"><label>59</label><citation-alternatives><mixed-citation xml:lang="ru">Zhu J., Tang J. D., Wang W., Liu J., Holub K. W., Yang R. Ultrafast thermoreflectance techniques for measuring thermal conductivity and interface thermal conductance of thin films // J. Appl. Phys. 2010. V. 108, N 9. P. 094315. DOI: 10.1063/1.3504213</mixed-citation><mixed-citation xml:lang="en">Zhu J., Tang J. D., Wang W., Liu J., Holub K. W., Yang R. Ultrafast thermoreflectance techniques for measuring thermal conductivity and interface thermal conductance of thin films. J. Appl. Phys., 2010, vol. 108, no. 9, p. 094315. DOI: 10.1063/1.3504213</mixed-citation></citation-alternatives></ref><ref id="cit60"><label>60</label><citation-alternatives><mixed-citation xml:lang="ru">Pietrak K., Wiśniewski T. S., Kubiś M. Application of flash method in the measurements of interfacial thermal resistance in layered and particulate composite materials // Thermochimica Acta. 2017. V. 654. P. 54—64. DOI: 10.1016/j.tca.2017.05.007</mixed-citation><mixed-citation xml:lang="en">Pietrak K., Wiśniewski T. S., Kubiś M. Application of flash method in the measurements of interfacial thermal resistance in layered and particulate composite materials. Thermochimica Acta, 2017, vol. 654, pp. 54—64. DOI: 10.1016/j.tca.2017.05.007</mixed-citation></citation-alternatives></ref><ref id="cit61"><label>61</label><citation-alternatives><mixed-citation xml:lang="ru">Narumanchi S., Mihalic M., Kelly K., Eesley G. Thermal interface materials for power electronics applications // 11th Intersociety Conf. Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM 2008). Orlando (FL, USA), 2008. DOI: 10.1109/ITHERM.2008.4544297</mixed-citation><mixed-citation xml:lang="en">Narumanchi S., Mihalic M., Kelly K., Eesley G. Thermal interface materials for power electronics applications. 11th Intersociety Conf. Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM 2008). Orlando (FL, USA), 2008, 10 pp. DOI: 10.1109/ITHERM.2008.4544297</mixed-citation></citation-alternatives></ref><ref id="cit62"><label>62</label><citation-alternatives><mixed-citation xml:lang="ru">Khounsary A. M., Chojnowski D., Assoufid L., Worek W. M. Thermal contact resistance across a copper-silicon interface // Proc. SPIE. V. 3151. High heat flux and synchrotron radiation beamlines. San Diego (CA, USA), 1997. P. 45—51. DOI: 10.1117/12.294497</mixed-citation><mixed-citation xml:lang="en">Khounsary A. M., Chojnowski D., Assoufid L., Worek W. M. Thermal contact resistance across a copper-silicon interface. Proc. SPIE. Vol. 3151, High heat flux and synchrotron radiation beamlines. San Diego (CA, USA), 1997, pp. 45—51. DOI: 10.1117/12.294497</mixed-citation></citation-alternatives></ref><ref id="cit63"><label>63</label><citation-alternatives><mixed-citation xml:lang="ru">Asano M., Ogata J., Yosinaga Y. Quantitative evaluation of contact thermal conductance in a vacuum as a result of simulating the effect of cooling // SPIE Proc. V. 1739. High heat flux engineering. San Diego (CA, USA), 1993. P. 652—656. DOI: 10.1117/12.140520</mixed-citation><mixed-citation xml:lang="en">Asano M., Ogata J., Yosinaga Y. Quantitative evaluation of contact thermal conductance in a vacuum as a result of simulating the effect of cooling. SPIE Proc. Vol. 1739, High heat flux engineering. San Diego (CA, USA), 1993, pp. 652—656. DOI: 10.1117/12.140520</mixed-citation></citation-alternatives></ref><ref id="cit64"><label>64</label><citation-alternatives><mixed-citation xml:lang="ru">Shah R. K., London A. L. Laminar Flow Forced Convection in Ducts. New York: Academic Press, 1978. P. 205.</mixed-citation><mixed-citation xml:lang="en">Shah R. K., London A. L. Laminar Flow Forced Convection in Ducts. New York: Academic Press, 1978, p. 205.</mixed-citation></citation-alternatives></ref><ref id="cit65"><label>65</label><citation-alternatives><mixed-citation xml:lang="ru">Takács G., Szabó P.G., Bognár Gy. Modelling of the flow-rate dependent partial thermal resistance of integrated microscale cooling structures // Microsyst. Technol. 2017. V. 23, N 9. P. 4001—4010. DOI: 10.1007/s00542-016-2879-2</mixed-citation><mixed-citation xml:lang="en">Takács G., Szabó P.G., Bognár Gy. Modelling of the flow-rate dependent partial thermal resistance of integrated microscale cooling structures. Microsyst. Technol., 2017, vol. 23, no. 9, pp. 4001—4010. DOI: 10.1007/s00542-016-2879-2</mixed-citation></citation-alternatives></ref><ref id="cit66"><label>66</label><citation-alternatives><mixed-citation xml:lang="ru">PSF-20cSt Pure Silicone Fluid. URL: http://www.clearcoproducts.com/pdf/low-viscosity/NP-PSF-20cSt.pdf (дата обращения: 28.03.2020).</mixed-citation><mixed-citation xml:lang="en">PSF-20cSt Pure Silicone Fluid. URL: http://www.clearcoproducts.com/pdf/low-viscosity/NP-PSF-20cSt.pdf (accessed: 28.03.2020).</mixed-citation></citation-alternatives></ref><ref id="cit67"><label>67</label><citation-alternatives><mixed-citation xml:lang="ru">Tools and Basic Information for Design, Engineering and Construction of Technical Applications. URL: http://www.engineeringtoolbox.com (дата обращения: 28.03.2020).</mixed-citation><mixed-citation xml:lang="en">Tools and Basic Information for Design, Engineering and Construction of Technical Applications. URL: http://www.engineeringtoolbox.com (accessed: 28.03.2020).</mixed-citation></citation-alternatives></ref><ref id="cit68"><label>68</label><citation-alternatives><mixed-citation xml:lang="ru">Application/Tech Guide – Galden Fluids. URL: http://www.swantek.com/html/products/galden.htm (дата обращения: 28.03.2020).</mixed-citation><mixed-citation xml:lang="en">Application/Tech Guide – Galden Fluids. URL: http://www.swantek.com/html/products/galden.htm (accessed: 28.03.2020).</mixed-citation></citation-alternatives></ref><ref id="cit69"><label>69</label><citation-alternatives><mixed-citation xml:lang="ru">Koehler R., Bruchhaus R., Pitzer D., Primig R., Schreiter M., Wersing W., Winkler B., Gerlach G., Hofmann G., Heß N. Pyroelectric thin film presence detector arrays with micromachined pixels // Integr. Ferroelectrics. 2002. V. 44, N 1. P. 77—90. DOI: 10.1080/10584580215151</mixed-citation><mixed-citation xml:lang="en">Koehler R., Bruchhaus R., Pitzer D., Primig R., Schreiter M., Wersing W., Winkler B., Gerlach G., Hofmann G., Heß N. Pyroelectric thin film presence detector arrays with micromachined pixels. Integr. Ferroelectrics, 2002, vol. 44, no. 1, pp. 77—90. DOI: 10.1080/10584580215151</mixed-citation></citation-alternatives></ref><ref id="cit70"><label>70</label><citation-alternatives><mixed-citation xml:lang="ru">Zhang X., Grigoropoulos C. P. Thermal conductivity and diffusivity of freestanding silicon nitride thin films // Rev. Sci. Instrum. 1995. V. 66. P. 1115. DOI: 10.1063/1.1145989</mixed-citation><mixed-citation xml:lang="en">Zhang X., Grigoropoulos C. P. Thermal conductivity and diffusivity of freestanding silicon nitride thin films. Rev. Sci. Instrum., 1995, vol. 66, p. 1115. DOI: 10.1063/1.1145989</mixed-citation></citation-alternatives></ref><ref id="cit71"><label>71</label><citation-alternatives><mixed-citation xml:lang="ru">Information about Dow Corning® brand silicone encapsulants, Dow Corning Corp., 2005. URL: http://bdml.stanford.edu/twiki/pub/Rise/PDMSProceSS/PDMSdatasheet.pdf (дата обращения: 22.03.2020).</mixed-citation><mixed-citation xml:lang="en">Information about Dow Corning® brand silicone encapsulants, Dow Corning Corp., 2005. URL: http://bdml.stanford.edu/twiki/pub/Rise/PDMSProceSS/PDMSdatasheet.pdf (accessed: 22.03.2020).</mixed-citation></citation-alternatives></ref><ref id="cit72"><label>72</label><citation-alternatives><mixed-citation xml:lang="ru">Suchaneck G., Gerlach G. Materials and device concepts for electrocaloric refrigeration // Phys. Scr. 2015. V. 90, N 9. P. 094020. DOI: 10.1088/0031-8949/90/9/094020</mixed-citation><mixed-citation xml:lang="en">Suchaneck G., Gerlach G. Materials and device concepts for electrocaloric refrigeration. Phys. Scr., 2015, vol. 90, no. 9, p. 094020. DOI: 10.1088/0031-8949/90/9/094020</mixed-citation></citation-alternatives></ref></ref-list><fn-group><fn fn-type="conflict"><p>The authors declare that there are no conflicts of interest present.</p></fn></fn-group></back></article>
