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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">mateltech</journal-id><journal-title-group><journal-title xml:lang="ru">Известия высших учебных заведений. Материалы электронной техники</journal-title><trans-title-group xml:lang="en"><trans-title>Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1609-3577</issn><issn pub-type="epub">2413-6387</issn><publisher><publisher-name>MISIS</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">mateltech-633</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Наноматериалы и нанотехнологии</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>NANOMATERIALS AND NANOTECHNOLOGY</subject></subj-group></article-categories><title-group><article-title>Электротранспортные свойства углеродной наноструктуры, полученной методом PECVD</article-title><trans-title-group xml:lang="en"><trans-title></trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-7274-1380</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Харченко</surname><given-names>А. А.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Харченко Андрей Андреевич</p><p>лаборатория физики перспективных материалов, Научно-исследовательское учреждение «Институт ядерных проблем» Белорусского государственного университета (НИИ ЯП БГУ), ул. Бобруйская, 11 220006, Минск, Беларусь</p><p>SPIN-код: 5781-7325, AuthorID: 997910</p><p>Web of Science ResearcherID:  AAE-3125-2019</p><p>Scopus Author ID: 56460244000</p></bio><email xlink:type="simple">XaaTM@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-7008-847X</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Федотов</surname><given-names>А. К.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Федотов Александр Кириллович</p><p>лаборатория физики перспективных материалов, Научно-исследовательское учреждение «Институт ядерных проблем» Белорусского государственного университета (НИИ ЯП БГУ), ул. Бобруйская, 11 220006, Минск, Беларусь</p></bio><email xlink:type="simple">akf1942@gmail.com</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-4471-0552</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Федотова</surname><given-names>Ю. А.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Федотова Юлия Александровна</p><p>лаборатория физики перспективных материалов, Научно-исследовательское учреждение «Институт ядерных проблем» Белорусского государственного университета (НИИ ЯП БГУ), ул. Бобруйская, 11 220006, Минск, Беларусь</p></bio><email xlink:type="simple">Julia@hep.by</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff xml:lang="ru" id="aff-1"><institution>Научно-исследовательское учреждение «Институт ядерных проблем» Белорусского государственного университета (НИИ ЯП БГУ)</institution><country>Belarus</country></aff><pub-date pub-type="collection"><year>2025</year></pub-date><pub-date pub-type="epub"><day>19</day><month>07</month><year>2025</year></pub-date><volume>28</volume><issue>2</issue><elocation-id>633</elocation-id><permissions><copyright-statement>Copyright &amp;#x00A9; Харченко А.А., Федотов А.К., Федотова Ю.А., 2025</copyright-statement><copyright-year>2025</copyright-year><copyright-holder xml:lang="ru">Харченко А.А., Федотов А.К., Федотова Ю.А.</copyright-holder><copyright-holder xml:lang="en">Харченко А.А., Федотов А.К., Федотова Ю.А.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://met.misis.ru/jour/article/view/633">https://met.misis.ru/jour/article/view/633</self-uri><abstract><p>Изучены дефектные графитовые слои, полученные на начальных стадиях формирования вертикального графена методом химического осаждения из газовой фазы усиленной микроволновой плазмой (PECVD) толщиной ≈ 20 нм и ≈ 35 нм. Температурные зависимости проводимости образцов, измеренные в интервале от 2 К до 300 К, демонстрируют полупроводниковый характер. Установлено, что в образце толщиной 20 нм механизм электротранспорта обусловлен комбинацией вклада описываемого теорией двухмерных (2D) квантовых поправок (КП) к проводимости Друде в условиях слабой локализации, доминирующих во всем температурном интервале, и обычного зонного вклада с активационным механизмом составляющего ≈8% при комнатной температуре. При увеличении толщины до 35 нм наблюдается дополнительный механизм проводимости, описываемый теорией трехмерных квантовых поправок с вкладом≈ 1,6 % при Т = 300К. Показано, что активационный механизм, несмотря на свой малый вклад в проводимость, оказывает существенное влияние на температурное изменение проводимости при Т &gt; 200 К, сопоставимое с величиной вклада механизма 2D КП.</p></abstract><kwd-group xml:lang="ru"><kwd>проводимость</kwd><kwd>квантовые поправки к проводимости</kwd><kwd>слабая локализация</kwd><kwd>вертикальный графен</kwd><kwd>углеродная наноструктура</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа выполнена при финансовой поддержке Государственной программы научных исследований Республики Беларусь «Фотоника и электроника для инноваций» на 2021–2025 годы, подпрограмма «Микро- и наноэлектроника», договор №20212560</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Yaguchi H., Singleton J. 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