For citations:

Kovalenko A.F., Vorobiev A.A. Method of Determining Nondestructive Pulse Laser Annealing Modes for Dielectric and Semiconductor Wafers. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2014;(3):206-210. (In Russ.) https://doi.org/10.17073/1609-3577-2014-3-206-210