For citations:
Sleptsova A.A., Chernykh S.V., Podgorny D.A., Zhilnikov I.A. Optimization of passivation in AlGaN/GaN heterostructure microwave transistor fabrication by ICP CVD. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2020;23(2):127-133. (In Russ.) https://doi.org/10.17073/1609-3577-2020-2-127-133