Обзор методов получения трихлорсилана для производства поликристаллического кремния
Аннотация
Об авторах
В. Н. ЯркинГермания
Владимир Н. Яркин: к.т.н.
Langbaurghstraße 15
53842 Troisdorf-Spich
Т. В. Критская
Украина
Критская Татьяна Владимировна
О. А. Кисарин
Украина
Олег А. Кисарин: к.т.н., доцент
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Яркин В.Н., Критская Т.В., Кисарин О.А. Обзор методов получения трихлорсилана для производства поликристаллического кремния. Известия высших учебных заведений. Материалы электронной техники. 2021;24(1). https://doi.org/10.17073/1609-3577-2021-1-
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