Thin films Y3Fe5O12/Ba0.8Sr0.2TiO3: synthesis and integration prospects

The work is devoted to the preparation of a composite system consisting of thin ferromagnetic films Y₃Fe₅O₁₂ and ferroelectric Ba_0.8Sr_0.2TiO₃ on silicon substrates. Films were obtained by ion-beam deposition and high-frequency sputtering. To coordinate parameters of crystal lattices and thermal expansion coefficients, as well as to prevent chemical interaction of film and substrate materials, a buffer layer of TiO₂ titanium dioxide (one of oxides of the initial composition of the target) is used, parameters of which are in good agreement with the lattice of strontium barium titanate. The composition, structure and microstructural properties of films are investigated. The possibility of application is shown not only in microelectronics, but most of all in microelectromechanics, especially for the production of ferroelectric membranes on silicon integrated into the devices of microsystem technology.

1. Stognii A.I., Serov A.A., Koryakin S.V., Pan’kov V.V. А low-pressure gas-discharge ion source with a hollow cathode and an output-aperture diameter of 420 mm. Instruments and Experimental Techniques. 2008; 51(2): 311—314. (In Russ.). https://doi.org/10.1007/s10786-008-2028-y

2. Ponds J.M., Kirchoefer S.W., Chang W., Horwitz J.S., Chrisey D.B. Microwave properties of ferroelectric thin films. Integrated Ferroelectrics. 1998; 22: 317—323. https://doi.org/10.1080/10584589808208052

3. Baniecki J.D., Laibowitz R.B., Shaw T.W., Duncombe P.R., Neumayer D.A., Kotecki D.E., Shen H., Ma Q.Y. Dielectric relaxation of Ba0.7Sr0.3TiO3 thin films from 1mHz to 20 GHz. Applied Physics Letters. 1998; 72: 498—500. https://doi.org/10.1063/1.120796

4. Kozyrev A.B., Ivanov A.V., Samoilova T.B., Soldatenkov O.I., Sengupta L.C., Rivkin T.V. Microwave properties of ferroelectric (Ba,Sr)TiO3 varactors at high microwave power Integrated Ferroelectrics. 1999; 24: 297—307. https://doi.org/10.1080/10584589908215599

5. Eerenstein W., Mathur N.D., Scott J.F. Multiferroic and magnetoelectric materials. Nature. 2006; 442: 759—765. https://doi.org/10.1038/nature05023

6. Ma J., Hu J., Li Z., Nan C.W. Recent progress in multiferroic magnetoelectric composites: from bulk to thin films. Advanced Materials. 2011; 23: 1062—1087. https://doi.org/10.1002/adma.201190024

7. Özgür Ü., Alivov Y., Morkoç H. Microwave ferrites. Part 1: Fundamental properties. Journal of Materials Science: Materials in Electronics. 2009; 20: 789—834. https://doi.org/10.1007/s10854-009-9923-2

8. Johnson K.M. Variation of dielectric constant with voltage in ferroelectrics and its application to parametric devices. Journal of Applied Physics. 1962; 33: 2826—2831. https://doi.org/10.1063/1.1702558

9. Kuylenstierna D., Vorobiev A., Linner P., Gevorgian S. Ultrawide-band tunable true-time delay lines using ferroelectric varactors. IEEE Transactions on Microwave Theory and Techniques. 2005; 53(6): 2164—2170. https://doi.org/10.1109/TMTT.2005.848805

10. Suherman P.M., Jackson T.J., Tse Y.Y., Jones I.P., Chakalova R.I., Lancaster M.J., Porch A. Microwave properties of Ba0.5Sr0.5TiO3 thin film coplanar phase shifters Journal of Applied Physics. 2006; 99(10): 104101. https://doi.org/10.1063/1.2198933

11. Balinskiy M., Ojha Sh., Chiang H., Ranjbar M., Ross C.A., Khitun A. Spin wave excitation in sub-micrometer thick Y3Fe5O12 films fabricated by pulsed laser deposition on garnet and silicon substrates: A comparative study. Journal of Applied Physics. 2017; 122(12): 123904. https://doi.org/10.1063/1.4990565

12. Sokolov, N.S. Fedorov V.V., Korovin A.M., Suturin S.M., Baranov D.A., Gastev S.V., Krichevtsov B.B., Maksimova K.Yu., Grunin A.I., Bursian V.E., Lutsev L.V., Tabuchi M. Thin yttrium iron garnet films grown by pulsed laser deposition: Crystal structure, static, and dynamic magnetic properties. Journal of Applied Physics. 2016; 119(2): 023903. https://doi.org/10.1063/1.4939678

13. Serga A.A., Chumak A.V., Hillebrands B. YIG magnonics. Journal of Physics D: Applied Physics. 2010; 43(26): 264002. https://doi.org/10.1088/0022-3727/43/26/264002

14. Pirro P., Bracher T., Chumak A.V., Lagel B., Dubs C., Surzhenko O., Gornert P., Leven B., Hillebrands B. Spin-wave excitation and propagation in microstructured waveguides of yttrium iron garnet/Pt bilayers. Applied Physics Letters. 2014; 104(1): 012402. https://doi.org/10.1063/1.4861343

15. Das J., Song Y.-Y., Mo N., Krivosik P., Patton C.E. Electric-field-tunable low loss multiferroic ferromagnetic-ferroelectric heterostructures. Advanced Materials. 2009; 21(20): 2045—2049. https://doi.org/10.1002/adma.200803376

16. Özgür Ü., Alivov Y., Morkoç H. Microwave ferrites. Part 2: Passive components and electrical tuning. Journal of Materials Science: Materials in Electronics. 2009; 20: 911—952. https://doi.org/10.1007/s10854-009-9924-1

17. Yang L., Ponchel F., Wang G., Rémiens D., Légier J.-F., Chateigner D., Dong X. Microwave properties of epitaxial (111)-oriented Ba0.6Sr0.4TiO3 thin films on Al2O3(0001) up to 40 GHz. Applied Physics Letters. 2010; 97(16): 162909. https://doi.org/10.1063/1.3478015

18. Ponchel F., Lei X., Rémiens D., Wang G. Dong X. Microwave evaluation of Pb0.4Sr0.6TiO3 thin films prepared by magnetron sputtering on silicon: Performance comparison with Ba0.3Sr0.7TiO3 thin films. Applied Physics Letters. 2011; 99(17): 172905. https://doi.org/10.1063/1.3656065

19. Guo X., Chen Yi., Wang G., Rémiens D., Ponchel Fr., Zhang W., Lian J., Dong X. Investigation of novel ferroelectric/gyromagnetic ferrite (Pb,Sr)TiO3/Y3Fe5O12 layered thin films with potential applications in magnetically and electrically tuning devices. Materials Letters. 2017; 195: 182—185. https://doi.org/10.1016/j.matlet.2017.02.126