FABRICATION OF A FERROELECTRIC DOMAIN STRUCTURE IN A LITAO3 CRYSTAL USING E-BEAM LITHOGRAPHY REPOLARIZATION
https://doi.org/10.17073/1609-3577-2013-2-23-25
Abstract
The process of repolarization of a LiTaO3 crystal by e−beam lithography was studied. The process of fabrication of ferroelectric domains with domain width of 1 μm was demonstrated. It was shown that in the 127° Y¢-cut of a ferroelectric LiTaO3 crystal the ferroelectric domains is formed at the angle of 37° the crystal surface and growth along polar axis Z from negative surface to positive surface Z.
About the Authors
D. V. Roshchupkin
Institute of Microelectronics Technology and High−Purity Materials Russian Academy of Sciences
Russian Federation
Russian Federation
E. V. Emelin
Institute of Microelectronics Technology and High−Purity Materials Russian Academy of Sciences
Russian Federation
Russian Federation
O. A. Buzanov
FOMOS Materials Co.
Russian Federation
Russian Federation
References
1. Ito, H. Fabrication of periodic domain grating in LiNbO3 by electron beam writing for application of nonlinear optical processes / H. Ito, C. Takyu, H. Inaba // Electron. Lett. – 1991. – V. 27. – P. 1221—126.
2. Fujimura, M. Quasi-phase-matched self-frequency doubling waveguide laser in Nd : LiNbO3 / M. Fujimura, T. Kodama, T. Suhara, H. Nishihara // IEEE Photon. Tech. Lett. – 2000. – V. 12. – P. 1513—1515.
3. Sasaki, Y. Terahertz−wave surface−emitted difference frequency generation in slant-stripe-type periodically poled LiNbO3 crystal / Y. Sasaki, Yu. Avetisyan, K. Kawase, H. Ito // Appl. Phys. Lett. – 2002. – V. 81. – P. 3323—3325.
4. Roshchupkin, D. V. Scanning electron microscopy observation of excitation of the surface acoustic waves by the regular domain structures in the LiNbO3 crystals / D. V. Roshchupkin, T. Fournier, M. Brunel, O. A. Plotitsyna, N. G. Sorokin // Ibid. – 1993. – V. 60. – P. 23303—23304.
5. Roshchupkin, D. V. Reflection of surface acoustic waves on domain walls in a LiNbO3 crystal / D. V. Roshchupkin, M. Brunel, R. Tucoulou, E. Bigler, N. G. Sorokin // Ibid. – 1994. – V. 64. – P. 164—165.
6. Cheng, S. Growth and transducer properties of an acoustic superlattice with its periods varying gradually / S. Cheng, Y. Zhu, Y. Lu, N. Ming // Ibid. – 1995. – V. 66. – P. 291—292.
7. Wan, Z. Fabrication of acoustic superlattice LiNbO3 by pulsed current induction and its application for crossed field ultrasonic excitation/ Z. Wan, Q. Wang, Y. Xi, Y. Lu, Y. Zhu, N. Ming // Ibid. – 2000.
8. – V. 77. – P. 1891—1892.
9. Ishigame, Y. LiNbO3 waveguide second-harmonic-generation device phase matched with a fan-out domain-inverted grating/Y. Ishigame, T. Suhara, H. Nishihara // Opt. Lett. – 1991. – V. 16. – P. 375—377.
10. Yamamoto, K. Characteristics of periodically domain-inverted LiNbO3 and LiTaO3 waveguides for second harmonic generation / K. Yamamoto, K. Mizuuchi, T. Takeshige, Y. Sasai, T. Taniuchi // J. Appl. Phys. – 1991. – V. 70. – P. 1947—1951.
11. Bermudez, V. Bulk periodic poled lithium niobate crystals doped with Er and Yb / V. Bermudez, M. D. Serrano, E. Dieguez // J. Cryst. Growth. – 1999. – V. 200. – P. 185—190.
12. Gupta, M. C. Second−harmonic generation in bulk and waveguided LiTaO3 with domain inversion induced by electron beam scanning / M. C. Gupta, W. Kozlovsky, A. C. G. Nutt // Appl. Phys. Lett. – 1994. – V. 64. – P. 3210—3212.
13. Rosenman, G. Submicron ferroelectric domain structures tailored by high−voltage scanning probe microscopy / G. Rosenman, P. Urenski, A. Agronin, Y. Rosenwaks, M. Molotskii // Ibid. – 2003. – V. 82. – P. 103—105.
14. Terabe, K. Microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric LiNbO3 crystal / K. Terabe, M. Nakamura, S. Takekawa, K. Kitamura, S. Higuchi, Y. Gotoh, Y. Cho // Ibid. – 2003. – V. 82. – P. 433—435.
15. Yamada, M. First-order quasi-phase matched LiNbO3 waveguide periodically poled by applying an external field for efficient blue second-harmonic generation / M. Yamada, N. Nada, M. Saitoh, K. Watanabe // Ibid. – 1993. – V. 62. – P. 435—436.
Review
For citations:
Roshchupkin D.V., Emelin E.V., Buzanov O.A. FABRICATION OF A FERROELECTRIC DOMAIN STRUCTURE IN A LITAO3 CRYSTAL USING E-BEAM LITHOGRAPHY REPOLARIZATION. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2013;(2):23-25. (In Russ.) https://doi.org/10.17073/1609-3577-2013-2-23-25
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