For citations:
Gusev A.S., Ryndya S.M., Zenkevich A.V., Kargin N.I., Averyanov D.V., Grekhov M.M. RESEARCH OF MORPHOLOGY AND STRUCTURE OF 3C-SIC THIN FILMS ON SILICON BY ELECTRON MICROSCOPY AND X-RAY DIFFRACTOMETRY. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2013;(2):44-48. (In Russ.) https://doi.org/10.17073/1609-3577-2013-2-44-48
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