For citations:

Vanyukhin K.D., Zakharchenko R.V., Kargin N.I., Seidman L.A. PECULIARITY OF FORMING TRANSPARENT CONDUCTING FILMS ON BASIS OF OXIDES INDIUM-TIN FOR CONTACTS ON GAN-BASED LIGHT EMITTING DIODES. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2013;(2):60-64. (In Russ.) https://doi.org/10.17073/1609-3577-2013-2-60-64