For citations:
Kurochka A.S., Sergienko A.A., Kurochka S.P., Kolybelkin V.I. Properties of Ion–Electron Emission from the Surface of Semiconductor Material During Reactive Ion–Beam Etching. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2014;(2):104-108. (In Russ.) https://doi.org/10.17073/1609-3577-2014-2-104-108
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