For citations:
Tereshchenko A.N., Shteinman E.A., Mazilkin A.A., Khorosheva M.A., Kononchuk O. Structures and Electronic Properties of Defects on the Borders of Silicon Bonded Wafers. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2014;(2):143-147. (In Russ.) https://doi.org/10.17073/1609-3577-2014-2-143-147