For citations:
Batalov R.I., Valeev V.F., Nuzhdin V.I., Vorobev V.V., Osin Yu.N., Lebedev D.V., Bukharaev A.A., Stepanov A.L. Synthesis of Porous Silicon with Silver Nanoparticles by Low–Energy Ion Implantation. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2014;(4):278-283. (In Russ.) https://doi.org/10.17073/1609-3577-2014-4-278-283
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