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Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering

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Abgaryan K.K., Evtushenko Yu.G., Mutigullin I.V., Uvarov S.I. MOLECULAR DYNAMIC MODELING OF THE INITIAL STAGES OF Si(111) SURFACE NITRIDIZATION IN NH₃ ATMOSPHERE. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2015;18(4):267-272. (In Russ.) https://doi.org/10.17073/1609-3577-2015-4-267-272



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ISSN 1609-3577 (Print)
ISSN 2413-6387 (Online)

National University of Science and Technology “MISIS”
4 Leninsky Prospect, Moscow, 119049 Russia
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