For citations:
Krapukhin V.V., Kosushkin V.G., Kozhitov L.V., Kostishin V.G., Muratov D.G., Popkova A.V. Evolution of models and algorithms for parameter calculation in micro- and nanoelectronics materials technology. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2016;19(3):179-188. (In Russ.) https://doi.org/10.17073/1609-3577-2016-3-179-188
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