For citations:
Kuzmenko A.P., Dint N., Kuzko A.E., Min Than M., Sin Win T., Kolpakov A.I. Nanoscale characterization of Cr, Cu, Al and Ni metallic magnetron nanofilm multilayers on sitall. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2016;19(3):195-203. (In Russ.) https://doi.org/10.17073/1609-3577-2016-3-195-203