For citations:
Kurochka S.P., Stepushkin M.V., Borisov V.I. Specifics of fabrication of Ohmic contacts to AlGaAs/GaAs heterostructures with a 2D electron gas. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2016;19(4):271-278. (In Russ.) https://doi.org/10.17073/1609-3577-2016-4-271-278