The getters in silicon

V. A. Kharchenko

Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering
Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhnikii

ISSN 1609-3577 (Print)
ISSN 2413-6387 (Online)

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Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering

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Kharchenko V.A. The getters in silicon. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2018;21(1):5-17. (In Russ.) https://doi.org/10.17073/1609-3577-2018-1-5-17

This work is licensed under a Creative Commons Attribution 4.0 License.

ISSN 1609-3577 (Print)
ISSN 2413-6387 (Online)

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About the Author

V. A. Kharchenko
Dorodnicyn Computing Centre, Federal Research Center «Computer Science and Control» of Russian Academy of Sciences
Russian Federation

Vyacheslav A. Kharchenko: Dr. Sci. (Eng.), Senior Researcher

40 Vavilov Str., Moscow 119333

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Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering

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