For citations:

Siksin V.V. Pilot installation for the purificationof the «warm liquid» of tetramethylsilane and conducting «non-accelerating experiments». Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2019;22(2):118-127. (In Russ.) https://doi.org/10.17073/1609-3577-2019-2-118-127