For citations:

Evdokimov V.L. Modeling of kinetics of chemical vapor deposition and the basic characteristics of the layers. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2021;24(2):88-96. (In Russ.) https://doi.org/10.17073/1609-3577-2021-2-88-96