For citations:
Orlov A.A., Ganykina E.A., Rezvanov A.A. Accounting of the porosity of the material in the simulation of the time-dependent dielectric breakdown in the metallization system of integrated circuits. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2021;24(4):242-247. (In Russ.) https://doi.org/10.17073/1609-3577-2021-4-242-247
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