For citations:
Kozlova N.S., Levashov E.A., Kiryukhantsev-Korneev P.V., Sytchenko A.D., Zabelina E.V. The possibilities of multi-angle spectrophotometry for determining the parameters of films on single-layer structures. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2022;25(2):154-163. (In Russ.) https://doi.org/10.17073/1609-3577-2022-2-154-163