For citations:
Starkov V.V., Gosteva E.A., Irzhak D.V., Roshchupkin D.V. Silicon wafer strain under local photonic annealing. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2017;20(2):142-147. (In Russ.) https://doi.org/10.17073/1609-3577-2017-2-142-147
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