For citations:
Enisherlova K.L., Temper E.M., Kolkovsky Yu.V., Medvedev B.K., Kapilin S.A. ALD Al2O3, SiNx, and SiON films as passivating coatings in AlGaN/GaN HEMT. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2019;22(3):202-211. (In Russ.) https://doi.org/10.17073/1609-3577-2019-3-202-211