For citations:
Zheleznov V.Yu., Malinskiy T.V., Mikolutskiy S.I., Rogalin V.E., Filin S.A., Khomich Yu.V., Yamshchikov V.A., Kaplunov I.A., Ivanova A.I. Modification of germanium surface exposed to radiation of a nanosecond ultraviolet laser. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2020;23(3):203-212. (In Russ.) https://doi.org/10.17073/1609-3577-2020-3-203-212