For citations:
Jarkin V.N., Kisarin O.A., Kritskaya T.V. Methods of trichlorosilane synthesis for polycrystalline silicon production. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2021;24(1):5-26. (In Russ.) https://doi.org/10.17073/1609-3577-2021-1-5-26
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