For citations:
Zorina M.V., Mikhailenko M.S., Pestov A.E., Perekalov A.A., Chkhalo N.I. Formation of an antireflective structure on the surface of single-crystal silicon by accelerated Xe ions. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2024;27(4):287-294. (In Russ.) https://doi.org/10.17073/1609-3577j.met202408.608
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