For citations:

Kovalenko A.F., Vorobiev A.A. The Method for Determination of Nondestructive Conditions of Laser Annealing of Dielectric and Semiconductor Plates. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2015;18(2):127-132. (In Russ.) https://doi.org/10.17073/1609-3577-2015-2-127-132