For citations:
Gavva V.A., Gusev A.V., Kotereva T.V. Diagnostics of Impurity Composition of High–Pure Monosilane by Results of the Analysis of a Test Silicon Single Crystal. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2014;(4):240-245. (In Russ.) https://doi.org/10.17073/1609-3577-2014-4-240-245
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