For citations:

Shcherbachev K.D., Voronova M.I. Application of X-ray diffraction and reflectometry methods for analysis of damaged layers on polar faces of ZnO after surface chemical-mechanical treatment. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2022;25(1):92-102. (In Russ.) https://doi.org/10.17073/1609-3577-2022-1-92-102