For citations:
Petrosyants K.O., Silkin D.S., Popov D.A. Evaluation of the effect of FinFET structure parameters on electrical characteristics using TCAD modeling tools. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2021;24(4):222-228. (In Russ.) https://doi.org/10.17073/1609-3577-2021-4-222-228
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