For citations:
Tkacheva T.M., Ivanova L.M., Demakov K.D., Shakhov M.N. Stress and Adhesion of CVD Grown Polycrystalline 3C–SiC Films on Silicon Substrates. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2012;(4):24-27. (In Russ.) https://doi.org/10.17073/1609-3577-2012-4-24-27
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