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Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering

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Vol 28, No 3 (2025)

MATERIALS SCIENCE AND TECHNOLOGY. SEMICONDUCTORS

MODELING OF PROCESSES AND MATERIALS

PHYSICAL CHARACTERISTICS AND THEIR STUDY

18
Abstract

In2O3:Er films have been synthesized on silicon substrates by RF magnetron sputter deposition. The solid solution ((In1-xErx)2O3) is formed here. The 1.534 mkm erbium electroluminescence is observed by the forward current through the investigated hetero-structure: substrate-n-Si\In2O3:Er-film\ITO-contact. The Er excitation model by the electron-hole recombination is proposed. The model consist of the electrons at the indium oxide conduction band. And the hole current is through the channel at the middle of the In2O3:Er band gap. The hole channel is formed by the defect state density spreading from the valence band edge into the band gap. Therefore the electron-hole recombination energy is lower then the indium oxide band gap and equals to the 1.56 eV. Then the electron-hole recombination excites in resonance the third excited state of Er3+ 4I9/2 (1.53 эВ). Then the non-radiative relaxation to the first excited state 4I13/2 (0.81 эВ) occurs. And finally the 1.534 mkm radiative emission into ground state 4I15/2 occurs.



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ISSN 1609-3577 (Print)
ISSN 2413-6387 (Online)